Michael O. Thompson
328 Bard Hall
Dr. Michael Thompson is currently an Associate Professor of Materials Science & Engineering at Cornell University. He received his B.S. in Applied Physics from California Institute of Technology in 1979 and M.S./Ph.D. degrees in Applied and Engineering Physics from Cornell University. For the past 28 years, Dr. Thompson's research has focused primarily on the behavior of semiconductor materials under pulsed and CW laser exposure. On the fundamental level, his group has explored limits to crystal growth under extreme conditions of laser irradiation, including limits to metastable impurity incorporation, behavior of point defects, interface stability, explosive crystallization, and group IV heteroepitaxy.
Key to this work has been the development of quantitative methods to monitor the kinetics of both melt and non-melt laser annealing of ultra-shallow junctions. In the late 1990's, he was involved in the development of melt-annealing methods to fabricate thin-film transistors on glass and flexible substrates. Subsequently, working with Verdant/Ultratech, he then pioneered the use of CO2 based non-melting annealing (LSA - Laser Spike Annealing) for ultra-shallow junctions which continues as a major research area in his group. Other area of research include electronic properties of polymer ferroelectric materials for use in flexible electronic memory, use of fibrous micro-composites for MEMS applications, and development of oxide semiconductors for high temperature air-stable electronics.
Currently his group is working on thermal, mechanical and defect modeling of LSA, new applications within VLSI front and back-end processing for LSA, use of sub-millisecond thermal heating for extreme UV lithography (EUVL), and large area flexible electronics. Dr. Thompson was a founder or co-founder of three startup companies and continues to work extensively with startup companies in the semiconductor area. He is a coauthor on more than 120 papers and 20 patents.
David Lynch graduated from the University of Virginia with a B.S. in chemical engineering in 2012. As an undergraduate, he engaged in research involving novel laser thin film deposition methods. He also has experience in the chemical industry through internships with Celanese. He is currently a Ph.D student working with Professor Thompson on IGZO structure and properties.
Hsien Lien received his B.S. in chemical engineering from National Chung Hsing University in 2012. Before coming to Cornell, he also worked at OmniVision Technologies. For his M.Eng. project, he worked under Paulette Clancy using computational methods to study silicon dopant diffusion in III-V material (InAs). Currently he is a M.S. student working in Professor Thompson's group on laser spike annealing to study dopant activation of III-V materials.
Emily Cheng is a junior in the department of Chemical and Biomolecular Engineering who joined the Thompson group in Spring 2016. She has been working on the III-V project on temperature calibrations of GaN using Laser Spike Annealing for use in microelectronic devices. Outside of research, she is involved in Society of Women Engineers, Less Than Three A Cappella, and Cornell Piano Society.